



CNC machined 316L EP cube-type 90 dual VCR flanged flow control valve body — electropolished finish, helium leak tested, UHP compatible.
| project | parameter svalues | |
316L EP Cube-Type 90° Dual VCR Flanged Flow Control Valve Body | Material | 316L Stainless Steel (1.4404) |
Internal Surface Finish | Electropolished Ra ≤ 0.4μm (16 μin) | |
Fitting Type | VCR Face Seal (Male/Female per Port Spec) | |
Leak Rate | ≤ 1×10⁻⁹ atm·cc/sec He | |
Cleanliness & Packaging | Cleanliness & Packaging Ultrasonic Cleaned, Cleanroom Double-Bagged | |
Standards | Standards SEMI F20, SEMI F81 | |
Traceability | Traceability Full Material & Batch Traceability | |
This 316L EP cube-type 90° dual VCR flanged flow control valve body is CNC machined for ultra-high-purity gas delivery systems requiring precise flow regulation with a compact, space-saving cube configuration. Precision-machined from 316L stainless steel with fully electropolished internal wetted surfaces (Ra ≤ 0.4μm), it ensures particle-free, outgassing-controlled performance in critical process gas environments. The cube design integrates two VCR face seal ports oriented at 90 degrees, each providing leak-tight, metal-to-metal sealing for high-integrity gas connections. Its compact, rigid geometry minimizes internal volume while maximizing flow path stability, making it ideal for dense gas panel layouts. Every valve body is helium leak tested (≤ 1×10⁻⁹ atm·cc/sec He), ultrasonically cleaned, and double-bagged in a cleanroom environment. Our ISO 9001 certified machining process delivers full material traceability, dimensional inspection reports, and surface finish certification with every shipment. Custom port sizes, flange dimensions, and surface treatments available upon request.
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