CNC machined 316L EP VCR flanged diaphragm valve for UHP semiconductor gas systems. Electropolished, SEMI F20. Quote.
| project | parameter svalues | |
316L EP VCR Male Tee Flow Control Valve Mounting Adapter Block | Material | 316L Stainless Steel (1.4404) |
Internal Surface Finish | Electropolished Ra ≤ 0.4μm (16 μin) | |
Fitting Type | VCR Male Face Seal | |
Leak Rate | ≤ 1×10⁻⁹ atm·cc/sec He | |
Cleanliness & Packaging | Ultrasonic Cleaned, Cleanroom Double-Bagged | |
Standards | SEMI F20, SEMI F81 | |
Traceability | Full Material & Batch Traceability | |
This VCR male external thread mounting adapter block is CNC machined for ultra-high-purity (UHP) gas delivery systems in semiconductor wafer fabrication equipment. Precision-machined from 316L stainless steel with electropolished internal surfaces (Ra ≤ 0.4μm / 16 μin), it ensures particle-free, outgassing-controlled performance in critical process gas environments. The integrated VCR male face seal fitting provides leak-tight, metal-to-metal sealing for high-integrity gas connections. Every adapter block is helium leak tested (≤ 1×10⁻⁹ atm·cc/sec He), ultrasonically cleaned, and double-bagged in a cleanroom environment. Our ISO 9001 certified machining process delivers full material traceability, dimensional inspection reports, and surface finish certification with every shipment. Custom port configurations, thread sizes, and surface finishes available upon request.
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