CNC machined 316L EP 90 VCR double flanged flow control valve body — electropolished finish, helium leak tested, UHP compatible.
| project | parameter svalues | |
316L EP 90° VCR Flanged Flow Control Valve Body (Double Flange Mount) | Material | 316L Stainless Steel (1.4404) |
Internal Surface Finish | Electropolished Ra ≤ 0.4μm (16 μin) | |
Fitting Type | VCR Face Seal (Male/Female per Port Spec) | |
Leak Rate | ≤ 1×10⁻⁹ atm·cc/sec He | |
Cleanliness & Packaging | Cleanliness & Packaging Ultrasonic Cleaned, Cleanroom Double-Bagged | |
Standards | Standards SEMI F20, SEMI F81 | |
Traceability | Traceability Full Material & Batch Traceability | |
This 316L EP 90° VCR double flanged flow control valve body is CNC machined for ultra-high-purity gas delivery systems where precise flow regulation and space-saving right-angle connections are required. Precision-machined from 316L stainless steel with fully electropolished internal wetted surfaces (Ra ≤ 0.4μm), it ensures particle-free, outgassing-controlled performance in critical process gas environments. Each port features an integrated VCR face seal fitting, providing leak-tight, metal-to-metal sealing for high-integrity gas connections. The double flange mounting design enables secure, vibration-resistant in-line installation. Every valve body is helium leak tested (≤ 1×10⁻⁹ atm·cc/sec He), ultrasonically cleaned, and double-bagged in a cleanroom environment. Our ISO 9001 certified machining process delivers full material traceability, dimensional inspection reports, and surface finish certification with every shipment. Custom flange dimensions, port sizes, and surface treatments available upon request.
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