



Válvula de diafragma bridada VCR 316L EP mecanizada por CNC para sistemas de gas UHP para semiconductores. Electropulida, SEMI F20. Solicite presupuesto.
| project | parameter svalues | |
Cuerpo de válvula de control de flujo VCR macho 316L EP | Material | 316L Stainless Steel (1.4404) |
Internal Surface Finish | Electropolished Ra ≤ 0.4μm (16 μin) | |
Fitting Type | VCR Male Face Seal | |
Leak Rate | ≤ 1×10⁻⁹ atm·cc/sec He | |
Cleanliness & Packaging | Ultrasonic Cleaned, Cleanroom Double-Bagged | |
Standards | SEMI F20, SEMI F81 | |
Traceability | Full Material & Batch Traceability | |
This 316L EP VCR male external thread flanged diaphragm valve body is CNC machined for ultra-high-purity (UHP) gas delivery systems in semiconductor wafer fabrication. Precision-machined from 316L stainless steel with fully electropolished internal wetted surfaces (Ra ≤ 0.4μm / 16 μin), it delivers particle-free, outgassing-controlled performance in critical process gas environments. The integrated VCR male face seal fitting ensures leak-tight, metal-to-metal sealing for high-integrity gas connections, while the flanged diaphragm interface provides reliable actuation and zero external leakage. Every valve body is helium leak tested (≤ 1×10⁻⁹ atm·cc/sec He), ultrasonically cleaned, and double-bagged in a cleanroom environment. Our ISO 9001 certified machining process delivers full material traceability, dimensional inspection reports, and surface finish certification with every shipment. Custom flange configurations, thread sizes, port layouts, and surface finishes available upon request.
Certificado ISO 9001 · Más de 15 años de experiencia · Más de 80 máquinas CNC · Presupuesto en 24 horas
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