



Vanne à diaphragme à bride VCR en 316L EP usinée CNC pour systèmes de gaz UHP semi-conducteurs. Électropolie, SEMI F20. Demandez un devis.
| Projet | Valeurs des paramètres | |
Bloc adaptateur en T pour vanne de régulation VCR mâle 316L EP | Material | 316L Stainless Steel (1.4404) |
Internal Surface Finish | Electropolished Ra ≤ 0.4μm (16 μin) | |
Fitting Type | VCR Male Face Seal | |
Leak Rate | ≤ 1×10⁻⁹ atm·cc/sec He | |
Cleanliness & Packaging | Ultrasonic Cleaned, Cleanroom Double-Bagged | |
Normes | SEMI F20, SEMI F81 | |
Traceability | Full Material & Batch Traceability | |
This 316L EP VCR male external thread flanged diaphragm valve body is CNC machined for ultra-high-purity (UHP) gas delivery systems in semiconductor wafer fabrication. Precision-machined from 316L stainless steel with fully electropolished internal wetted surfaces (Ra ≤ 0.4μm / 16 μin), it delivers particle-free, outgassing-controlled performance in critical process gas environments. The integrated VCR male face seal fitting ensures leak-tight, metal-to-metal sealing for high-integrity gas connections, while the flanged diaphragm interface provides reliable actuation and zero external leakage. Every valve body is helium leak tested (≤ 1×10⁻⁹ atm·cc/sec He), ultrasonically cleaned, and double-bagged in a cleanroom environment. Our ISO 9001 certified machining process delivers full material traceability, dimensional inspection reports, and surface finish certification with every shipment. Custom flange configurations, thread sizes, port layouts, and surface finishes available upon request.
Certifié ISO 9001 · Plus de 15 ans d’expérience · Plus de 80 machines CNC · Devis sous 24 heures
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